REGENERATING APPARATUS AND REGENERATING METHOD OF ORGANIC FILM WASHING LIQUID, AND WASHING DEVICE AND WASHING METHOD OF ORGANIC FILM

摘要

PROBLEM TO BE SOLVED: To provide a regenerating method of organic film washing liquid and a regenerating apparatus of organic film washing liquid which is capable of regenerating the ability of washing liquid having alkylene carbonate as an effective component for dissolving organic film, circulating the regenerated liquid as the washing liquid and regenerating the washing liquid without using ozone. SOLUTION: The regenerating apparatus of organic film washing liquid capable of recycling alkylene carbonate as the washing liquid comprises a washing tank of storing the washing liquid using alkylene carbonate as an effective component, a rectification means which rectifies the washing liquid with the dissolved organic film transferred from the washing tank and separates alkylene carbonate, a condensing means which condenses and liquefies the alkylene carbonate separated by the rectification means and a circulation means which transfers and circulates the alkylene carbonate liquefied by the condensing means from the washing tank to the washing tank via the rectification means and the circulation means. COPYRIGHT: (C)2005,JPO&NCIPI