CERAMIC HEATER AND METHOD FOR MANUFACTURE THEREOF

摘要

A ceramic heater which has a ceramic body having a resistance heating element in the inside thereof, an electrode pad being formed on the surface of the ceramic body and having a boron-based plating layer, and a brazing material and a lead member being joined to the electrode pad by a baking treatment in a nitrogen reducing gas atmosphere, wherein the surface of the above plating layer contains boron (B) in an amount of 1 wt % or less. In the above ceramic heater, the amount of boron carbide being deposited on the surface of the plating layer is suppressed and thus the satisfactory area for the join with the brazing material can be secured.