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发明名称
Vorrichtung zur Resistbeschichtung und Entwicklung des Resists
摘要
申请公布号
DE69830342(D1)
申请公布日期
2005.06.30
申请号
DE19986030342
申请日期
1998.01.29
申请人
TOKYO ELECTRON LTD., TOKIO/TOKYO
发明人
YOSHIOKA, KAZUTOSHI;OGATA, KUNIE
分类号
G03F7/16;G03F7/30;G03F7/38;(IPC1-7):G03F7/16
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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