POLISHING PAD AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a polishing pad hardly expanding/contracting in the outer diameter dimension.

SOLUTION: In the method of manufacturing the polishing pad with a small dimensional change, a polyurethane foam block for the polishing pad is formed and then sliced to form a polishing sheet which is cut to form the polishing pad. In this case, before cutting, the polishing sheet is left standing in an environment of a predetermined temperature and humidity for at least five hours.

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