| 摘要 |
<P>PROBLEM TO BE SOLVED: To simplify manufacturing process and to miniaturize whole system by easy decompression in a sealed cavity close to vacuum state without setting of special structure such as getter. <P>SOLUTION: In manufacturing of a sensor of angular velocity, the sealed cavity enclosing an oscillator 6 and others is formed by applying anode junction of a substrate 3 and a roof plate 12 (glass plates 15 and 16) with an outer frame 4 (silicon wafer 17) in decompression atmosphere. Additionally, by heating those members after anode junction at the specified temperature in the specified time interval, residual gas generated in the sealed cavity during anode junction is removed to decompress inside of the sealed cavity 13. Thus, because inside of the sealed cavity 13 can easily be decompressed to near vacuum state without arrangement of getters and others for oxygen absorption in the sealed cavity 13, the high productivity can be realized by simplifying manufacturing process together with miniaturization of the sealed case 2. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
