| 发明名称 |
LITHOGRAPHY DEVICE AND DEVICE MANUFACTURING METHOD |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method by which yield of a manufacturing process of a device consisting of two substrates is improved without sacrificing characteristics of the device to be produced. <P>SOLUTION: The method for manufacturing a flat panel display device consisting of an active board and a passive board is provided. The active board is formed based on a standard pattern and inspected. Next, the passive board is formed by correcting pattern data for the passive board according to an actual pattern formed on the active board to make sure that patterns formed on the active board and on the passive board closely correspond to each other. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
| 申请公布号 |
JP2005173563(A) |
申请公布日期 |
2005.06.30 |
| 申请号 |
JP20040321396 |
申请日期 |
2004.11.05 |
| 申请人 |
ASML NETHERLANDS BV |
发明人 |
HOEFNAGELS JOHAN CHRISTIAAN GERARD;SPIT PETER |
| 分类号 |
G02F1/13;G02F1/1333;G02F1/1335;G03F7/20;G03F9/00;G09F9/00;G09F9/30;H01J37/08;H01L21/027 |
主分类号 |
G02F1/13 |
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