| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for much more efficiently removing residual black points in a process for peeling a processing object such as a resist. SOLUTION: This object processor for removing any unnecessary object on the processing object surface of an object is provided with a means which arranges the object in a device, a means which supplies oxygen to the device to hold the object in an oxidizing atmosphere, and a heating means which heats the object to a predetermined temperature and a cooling means which cools the object. This object processor is configured to execute object cooling processing for cooling the object after object heating processing for heating and holding the object in predetermined temperature. COPYRIGHT: (C)2005,JPO&NCIPI
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