| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact optical deflector that can be operated at a high speed, with low power consumption. SOLUTION: The optical deflector has a coil formed on a substrate and a tabular scanning mirror that makes an angular movement, responding to magnetism generated by energization of the coil, and is characterized by one surface of the mirror being a reflecting mirror part, and a magnetized scarious permanent magnet being formed on the other surface. The coil and the scanning mirror are disposed substantially parallel to each other, and the center of the coil and the center of the scanning mirror are disposed substantially on the same axis. The innermost perimeter of the coil extends to the inside of a part facing the scanning mirror, and there is at least one through hole adjacent to the scanning mirror of the substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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