发明名称 Verfahren zur Herstellung einer Halbleiteranordnung, z. B. eines Transistors oder einer Kristalldiode
摘要 918,028. Semi-conductor devices; etching electrolytically. PHILIPS ELECTRICAL INDUSTRIES Ltd. Sept. 1, 1959 [Sept. 4, 1958], No. 29790/59. Classes 37 and 41. A method of making a semi-conductor device comprises alloying an acceptor material to an edge of a thin P-type zone and to the adjoining parts of a thicker N-type zone and subsequently electrolytically etching the assembly with the recrystallized material connected as anode. In the embodiment (Fig. 1) in which aluminium 4 is alloyed to the middle zone 2 and adjacent parts of the end zones 1, 3, of an NPN silicon body, a wire 5 of tungsten or molybdenum, to serve as an electrode, is introduced into the aluminium while it is molten. After cooling, the body is immersed in a solution of hydrofluoric acid and alcohol and an etching current passed between electrode 5 connected as anode and a platinum cathode in the solution until the configuration shown in Fig. 2 is attained with electrode 5 on a circular pillar 12 of P-type material. As an alternative a linear contact running along the length of the middle zone may be provided.
申请公布号 DE1143273(B) 申请公布日期 1963.02.07
申请号 DE1959N017169 申请日期 1959.09.01
申请人 N. V. PHILIPS' GLOEILAMPENFABRIEKEN 发明人 MEMELINK OSCAR WILLEM
分类号 H01L21/3063;H01L21/308;H01L29/00 主分类号 H01L21/3063
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