发明名称 Semiconductor device and method of manufacturing the same
摘要 Provided is a semiconductor device capable of reducing the resistance of the gate electrode of a transistor. The semiconductor device comprises a semiconductor substrate, a gate oxide film formed on the substrate, a gate formed on the gate oxide film, and a metal silicide layer formed on the top surface and the upper side surface of the gate.
申请公布号 US2005139938(A1) 申请公布日期 2005.06.30
申请号 US20040023845 申请日期 2004.12.27
申请人 DONGBUANAM SEMICONDUCTOR INC. 发明人 KIM YEONG S.
分类号 H01L21/28;H01L21/336;H01L23/62;(IPC1-7):H01L23/62 主分类号 H01L21/28
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