发明名称 Laser beam pattern mask and crystallization method using the same
摘要 A laser beam pattern mask includes at least one or more transmitting parts, each transmitting part having a central portion and a pair of edge portions provided to both sides of the central portion, each having a substantially triangular shape defined by a virtual boundary line between the central portion and the corresponding edge portion, an upper outside extending from an upper end of the boundary line at an acute angle, and a lower outside extending from a lower end of the boundary line at the acute angle to meet the upper outside at a rounded corner.
申请公布号 US2005142450(A1) 申请公布日期 2005.06.30
申请号 US20040963712 申请日期 2004.10.14
申请人 发明人 JUNG YUN H.
分类号 G02F1/13;B23K26/06;G03F1/14;H01L21/20;H01L21/77;H01L21/84;(IPC1-7):G03F9/00;H01L21/00 主分类号 G02F1/13
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