| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray aligner which can increase a resolution and an exposure tolerance. SOLUTION: In proximity X-ray exposure, a main element forming an absorber has an atomic number of 22 to 29. In the proximity X-ray exposure, a main element forming the absorber has no absorption edge in a wavelength range where the peak intensity of an X ray spectrum absorbed in a resist is 80% or higher. Further, in the proximity X-ray exposure, a main element forming the absorber has no absorption edge in a wavelength range of 0.45 to 0.7 nm. In the proximity X-ray exposure, a main element forming a filter forms the absorber. COPYRIGHT: (C)2005,JPO&NCIPI
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