| 摘要 |
PROBLEM TO BE SOLVED: To provide a regenerating processing device for a waste photoresist developer in which the problem of the quality failure of a regenerating developer does not occur even in an ON/OFF operating state, and even if a refinery such as CP or the like is installed at a latter stage, a problem of its load increase does not occur. SOLUTION: The regenerating processing device for the waste photoresist developer contains an isolating and recovering device (e.g., an NF film isolator or an electric dialyzer) at one stage or a multi-stage for isolating and recovering tetra-alkyl ammonium ions from the waste developer containing at least a photoresist and the tetra-alkyl ammonium ions, or a treating agent derived from the waste developer, and a mechanism for blowing an isolating and recovering agent from the one stage of the isolating and recovering device or the isolating and recovering agent from the multi-stage, at least the one stage to outside of this system, and/or a mechanism for returning it to a preceding stage of the isolating and recovering device. COPYRIGHT: (C)2005,JPO&NCIPI |
