| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and device for detecting line defects on a panel with enhanced detection accuracy for line defects as to a method and device for accurately and automatically detecting line defects on a panel, the line defects continuously arising in a lengthwise or crosswise direction in an inspection process in manufacturing a display device such as a liquid crystal panel and a projector which is an applied product thereof. <P>SOLUTION: This method comprises processes S6 and S7 for applying edge detection filters in different directions (horizontal and vertical) in order to stress line defects for detection to an image obtained by imaging an inspecting object panel, processes S8 and S9 for performing divided profile processing for dividing a luminance value of each pixel of an edge detection image in which line defects are stressed and the luminance values of respective pixels are integrated in direction in which line defects are stressed for each of divided areas to obtain integrated values, processes S10 and S11 for finding, by means of moving averages, an average value of integrated values in each of divided areas in which line defects are stressed and calculating statistical data by using the integrated values and the average value, and a process S12 for setting a threshold value of the integrated values based on the statistical data to extract defect candidates from the statistical data and the threshold value. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
