| 摘要 |
PROBLEM TO BE SOLVED: To provide substrate processing equipment and its managing method, which realize high efficiency maintenance work while ensuring safety of a worker positively. SOLUTION: In the substrate processing equipment 100, maintenance work is performed for each operating section. At predetermined positions on the side face of an equipment space 500, doors D1-D5 are provided and interlock switches IN1-IN5 are provided, respectively, for the doors D1-D5. In the vicinity of the doors D1-D5, interlock releasing sections R1-R5 are provided, respectively, in order to set the function of the interlock switches IN1-IN5 ineffective thus sustaining the power supply of a specific operating section out of respective operating sections in the equipment space in off state and sustaining the power supply of other operating sections in on state. At predetermined positions on the side face of the equipment space 500, reoperation commanding sections SI, SC, S2 and S3 for bringing into on state the power supply of a specific operating section which is brought into off state through operation of the interlock releasing section R1-R5, are provided. COPYRIGHT: (C)2005,JPO&NCIPI
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