发明名称 Semiconductor device and manufacturing method therefor
摘要 The present invention provides a semiconductor device that permits free setting of characteristics of individual semiconductor elements which are mixedly mounted and have different characteristics, and is free of steps between formed semiconductor elements, and a manufacturing method for the same. In the semiconductor device, an n-type silicon layer is deposited on a p-type silicon substrate by epitaxial growth, and then an SOI layer is deposited thereon through the intermediary of a BOX layer. A junction transistor using a part of the n-type silicon layer as a channel region and a MOS transistor using the SOI layer are produced. The semiconductor device ensures uniform resist, control of contact depths, wire processability, etc., making the semiconductor device ideally suited for microminiaturization.
申请公布号 US2005139907(A1) 申请公布日期 2005.06.30
申请号 US20040853645 申请日期 2004.05.26
申请人 TANAKA HIROYUKI 发明人 TANAKA HIROYUKI
分类号 H01L21/28;H01L21/02;H01L21/337;H01L21/76;H01L21/762;H01L21/768;H01L21/8232;H01L21/8234;H01L21/84;H01L27/06;H01L27/08;H01L27/088;H01L27/12;H01L29/417;H01L29/423;H01L29/49;H01L29/786;H01L29/808;(IPC1-7):H01L27/10 主分类号 H01L21/28
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