| 摘要 |
PROBLEM TO BE SOLVED: To provide a light receiver capable of effectively performing photoelectric conversion of incident light from the surface of a substrate and a simple and inexpensive manufacturing method for the light receiver. SOLUTION: The light receiver has a p-type layer 101, an i-type layer 102, and an epitaxial n-type layer 103 which are successively formed from a light incident surface and has also an isolating/insulating oxide film 104. In the light receiver, a reflection member 106 is formed in a recess 105 formed on the backside of the substrate so as to be formed just behind the n-type layer 103 through the oxide film 104. The recess 105 is formed by etching and the reflection member 106 of a mirror of high quality is formed by forming a metallic film of Al, Ag, Au, etc. or a dielectric film so that the oxide film 104 becomes an end point. Consequently, a manufacturing process of the reflection member 106 becomes a simple and inexpensive process only for etching the backside of the substrate and forming a film. In performing anisotropic etching by using an alkali etching solution, the reflection member 106 which is the mirror formed just backside of the light receiver can be formed by an extremely inexpensive process. COPYRIGHT: (C)2005,JPO&NCIPI
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