| 摘要 |
PROBLEM TO BE SOLVED: To provide a dual axis driving light deflector having a gimbal structure in which a crosstalk between respective driving signals of two axes is reduced. SOLUTION: The light deflector has: a movable mirror 1; a gimbal 3 which rockably supports the movable mirror 1 around a rotary axis with a first supporting part 2; a frame 5 which rockably supports the gimbal 3 around an rotary axis which has an angle with the rotary axis of the movable mirror 1 with a second supporting part 4; a movable electrode 6 on the gimbal 3 having a face substantially parallel to the rocking direction of the gimbal 3; a fixed electrode 7 which is so arranged to face the plane of the movable electrode 6; an electrostatic driving means which displaces the gimbal 3 with electrostatic force acting between the movable electrode 6 and the fixed electrode 7; and an electromagnetic driving means which displaces the movable mirror 1 with electromagnetic force. COPYRIGHT: (C)2005,JPO&NCIPI
|
