发明名称 RADIATION DETECTOR, ITS MANUFACTURING METHOD, AND RADIATION IMAGING SYSTEMS
摘要 PROBLEM TO BE SOLVED: To improve X-ray absorption of a fluorescent formation substrate, and to reuse a expensive heat-resistant substrate. SOLUTION: The manufacturing method of the radiation detector at least comprising the fluorescent screen 100 composed of the columnar fluorescent layer 3 and the protective layer 4 protecting the fluorescent layer 3, the light sensor 110 provided with a plurality of the photoelectric conversion elements 6 for photo-electrically transducing the light from the columnar fluorescent layer 3, and the bond layer 5 for bonding the optical sensor 110 with the fluorescent screen 100, comprises processes as follows: a process for forming the fluorescent screen 100 by forming the columnar fluorescent layer 3 on the fluorescent formation substrate 1; a lamination process for laminating the fluorescent screen 100 provided with the columnar fluorescent layer 3 formed on the fluorescent formation substrate 1, on the optical sensor 110 formed with a plurality of photoelectric transducer element 6 via the bond layer 5 and bonded together; and a separation process for separating the fluorescent formation substrate 1 from the columnar fluorescent layer 3 in the fluorescent screen 100 laminated on the optical sensor 110. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005172511(A) 申请公布日期 2005.06.30
申请号 JP20030410528 申请日期 2003.12.09
申请人 CANON INC 发明人 OGAWA YOSHIHIRO
分类号 G01T1/20;H01L27/14;H01L31/09;H04N5/321;(IPC1-7):G01T1/20 主分类号 G01T1/20
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