| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum drier capable of uniformly drying dried objects without generating the dispersion in film thickness and film shape therof, and to provide an electro-optical device, a method of manufacturing the electro-optical device, and an electronic apparatus. SOLUTION: This vacuum dryer comprises a furnace 10 for putting the dried objects therein, a plurality of roughing vacuum lines 101, 102 connected to the furnace 10 for exhausting a gas in the furnace 10, conductance valves 121, 122 respectively mounted on the roughing vacuum lines 101, 102, one main vacuum line 111 connected with the furnace 10 for exhausting the gas in the furnace 10 with a degree of vacuum higher than that of the roughing vacuum lines 101, 102, and a pressure adjusting valve 131 mounted on the main vacuum line 111. COPYRIGHT: (C)2005,JPO&NCIPI
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