| 摘要 |
PROBLEM TO BE SOLVED: To shorten operation time required for exchanging a prober and to correspond to a plurality of kinds of substrate inspectional matters with one prober in a liquid crystal substrate inspecting apparatus for inspecting a liquid crystal substrate using the prober. SOLUTION: In the liquid crystal substrate inspecting apparatus for inspecting the liquid crystal substrate using the prober, a frame 1 is constituted of a prober frame 3 provided with the prober and an outer frame 2 freely slidably guiding the prober frame 3 and the prober is made to be freely slidable to the liquid crystal substrate by sliding the prober frame 3 to the outer frame 2. Thereby, a prober pin of the prober can be aligned with an electrode of the liquid crystal substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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