| 摘要 |
PROBLEM TO BE SOLVED: To provide vibration resistant technology by a gas spring for performing control at high speed and with high accuracy. SOLUTION: A vibration resistant mount device has an air supply and exhaust control circuit 114, having an elastic film 101 of the gas spring for reducing transmission of external vibration such as floor vibration or the vibration caused by influence of operation of a movable part on which an equipment device itself is loaded, for controlling the gas spring, a tank 104 and air supply and exhaust thereof, a heat accumulating member 105 having large surface area and provided in inner space of at least one of the gas spring and the tank, and a both-direction flow rate sensor 112 for measuring an unsteady flow rate, provided in a gas control flow passage 111 from the air supply and exhaust control circuit 114 to the gas spring or the tank and allowing flow rate measurement in both directions. The air supply and exhaust control circuit 114 is controlled by using an output signal of the both-direction flow rate sensor 112. COPYRIGHT: (C)2005,JPO&NCIPI
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