发明名称 Method of manufacturing electron-emitting source
摘要 A film ( 7 ) is formed by electrodeposition, thermal CVD, or spraying. After that, the film is irradiated with a laser beam. Carbon nanotubes that form the film ( 7 ) are disconnected by laser irradiation, so that the density of the carbon nanotubes is optimized. When the film ( 7 ) is formed in this manner, stable emission can be obtained from a cathode structure ( 5 ).
申请公布号 US2005142978(A1) 申请公布日期 2005.06.30
申请号 US20040824310 申请日期 2004.04.13
申请人 YOTANI JUNKO;UEMURA SASHIRO;KURACHI HIROYUKI 发明人 YOTANI JUNKO;UEMURA SASHIRO;KURACHI HIROYUKI
分类号 C01B31/02;C23C16/26;H01J1/304;H01J9/02;H01J9/04;H01J9/12;H01J29/46;H01J31/12;H01J63/02;(IPC1-7):H01J9/04 主分类号 C01B31/02
代理机构 代理人
主权项
地址