Method for fabricating nano pore

摘要

Provided is a method for fabricating a nanoscale pore which has been researched in a molecular electronics field of chemistry and in a molecular dynamics field of biology, wherein a oxidation pattern is selectively formed on a thin mask layer by anodic nano-oxidation using an AFM, and the oxidation pattern is selectively etched, thereby fabricating the nanoscale pore. Thus, the present invention provides a simple and easy method for fabricating nano pore array.