发明名称 Probe device
摘要 A probe device comprises a cantilever comprising a probe allocated to be opposed to a surface of a sample, means for feeding back a vibration amplitude value of the cantilever, thereby self-exciting and vibrating the cantilever at a predetermined frequency, means for applying a bias to the sample or the probe, and means for measuring a frequency shift caused by a charge-transfer force which acts between the cantilever and the sample.
申请公布号 US2005139770(A1) 申请公布日期 2005.06.30
申请号 US20050065273 申请日期 2005.02.25
申请人 MATSUMOTO TAKUYA;NAITOH YASUHISA;KAWAI TOMOJI 发明人 MATSUMOTO TAKUYA;NAITOH YASUHISA;KAWAI TOMOJI
分类号 G01Q60/34;(IPC1-7):G21K7/00;G01N23/00 主分类号 G01Q60/34
代理机构 代理人
主权项
地址