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发明名称
Mikrosystem, Verfahren zu seiner Herstellung und seine Verwendung
摘要
申请公布号
DE19829202(B4)
申请公布日期
2005.06.30
申请号
DE19981029202
申请日期
1998.06.30
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
PANNKOKE, KORD;CLUEVER, MATTHIAS;GESANG, THOMAS
分类号
H01L41/08;H01L41/113;(IPC1-7):B81B3/00;B81C5/00;G12B1/00
主分类号
H01L41/08
代理机构
代理人
主权项
地址
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