| 摘要 |
PROBLEM TO BE SOLVED: To provide an image processing method capable of reducing slimming of a sample, and of providing optimum image quality having high visibility, in a scanning electron microscope. SOLUTION: Slimming is reduced by reducing a frame cumulative number. Since a secondary electron detection amount is reduced when the frame cumulative is reduced, the secondary electron detection amount is increased by increasing the amount of a probe current. A histogram is created by executing electron beam scanning (S12), and the histogram is secondarily differentiated (S13) to calculate gradation where contrast of a sample image changes and the amount of a probe current (S16). By adjusting the cumulative frame number suitable for the calculated amount of the probe current and the contrast suitable for the sample image (S17), slimming of the sample is suppressed, and the optimum sample image having high visibility is obtained to measure length (S18). COPYRIGHT: (C)2005,JPO&NCIPI
|
