OPTICAL CHARACTERISTIC ANALYSIS SYSTEM OF OPTICAL INSTRUMENT, OPTICAL CHARACTERISTIC ANALYZING METHOD, ITS PROGRAM, AND OPTICAL COMPONENTS MANUFACTURED BY ITS METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical characteristic analysis system which can grasp correctly the influence of deformation caused by mechanical or thermal behaviors, by suppressing shape deviation of the optical surface in the case of performing a simulation. SOLUTION: The shape of an optical system designed on the basis of design formula with optical design tools is inputted into a deformation-analysis tool so as to investigate mechanical or thermal behaviors. In the case of searching for a more optimal shape of the optical system from the state of deformation, a higher-precision simulation result can be obtained in modeling of a deformation-analysis tool, in such a way that the model generated coarsely is amended based on a design formula, and numerical analysis is conducted about the amended model. COPYRIGHT: (C)2005,JPO&NCIPI