Photodetector for low light power levels has monolithically integrated transimpedance amplifier, evaluation electronics, connections between photocell, electronic circuit parts parallel to chip normal and/or perpendicular to chip plane

摘要

The device has an integral photocell part (20) associated with one chip side (R), preferably on which light is incident, an electronic circuit part (30) on the opposite side (V) of the chip and electrical connections (41a,41b) between the photocell and electronic circuit parts extending in a direction parallel to a chip normal and/or extending in a direction perpendicular to the chip plane. An independent claim is also included for a method of manufacturing an inventive device.