DIFFERENTIAL PRESSURE SENSOR

摘要

The invention relates to a differential pressure sensor having a low hysteresis volume. Said sensor comprises a sensor element (1), two pressure measuring chambers (21, 31) which lie adjacent to the sensor element, two pressure receiving chambers (22, 32) which are closed by separating membranes (21, 31), and two overload chambers (23, 33) which are separated by an overload membrane (6), said overload membrane (6) comprising a closed outer edge and a closed inner edge and being firmly fixed along said outer and inner edge thereof.