| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To shorten the time required in inspection, to suppress the occurrence of flaws by minimizing the physical contact with glass substrate, and to prevent vibration of the glass substrate and conduct accurate inspection. <P>SOLUTION: A clamping device 100 for inspecting the glass substrate is composed of a fixed frame 140 installed on an inspection zone, first and second upper clamps 111 and 112, and first and second lower clamps 121 and 122. The second lower clamp 122 includes a lower clamp means 120, installed so as to be freely moved left and right along the underside of the fixed frame and the side part clamping means 130 comprising a plurality of side part clamps, respectively installed on both sides of the fixed frame and clamping both end parts of the glass substrate and pulling the glass substrate to both sides so that the glass substrate is stretched to the right and the left. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
