| 发明名称 |
METHOD AND APPARATUS FOR TERAHERTZ ELECTROMAGNETIC-WAVE IRRADIATION |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and an apparatus having high resolution capable of measuring the transmitting or reflecting intensity of a terahertz electromagnetic wave for obtaining the image of metallic parts inside an electronic component or a card. <P>SOLUTION: A high-frequency terahertz electromagnetic wave is generated by irradiating a crystal for frequency mixing with a beam of a solid-state Raman laser which is oscillated by exciting with a pump laser and a beam of the pump laser. The generated terahertz electromagnetic wave is converged into a fine beam by a tapered metal waveguide. The converged beam is transmitted or reflected by an object to be tested placed on an xy moving stage to obtain the image. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
| 申请公布号 |
JP2005175409(A) |
申请公布日期 |
2005.06.30 |
| 申请号 |
JP20030436321 |
申请日期 |
2003.12.05 |
| 申请人 |
SEMICONDUCTOR RES FOUND |
发明人 |
NISHIZAWA JUNICHI;SUDO KEN |
| 分类号 |
G02F1/37;H01S3/10;H01S3/108;H01S3/30;(IPC1-7):H01S3/108 |
主分类号 |
G02F1/37 |
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