发明名称 Semiconductor device and fabricating method thereof
摘要 The present invention provides a semiconductor device and fabricating method thereof, by which capacitance is enhanced by increasing an effective area of a lower electrode of a capacitor. The present invention includes a first lower electrode on a semiconductor substrate to have a plate shape, a second lower electrode on the first electrode to have a [<img id="custom-character-00001" he="2.46mm" wi="3.56mm" file="US20050142732A1-20050630-P00900.TIF" alt="custom character" img-content="character" img-format="tif"/>] type (or "wing"-type) cross-section, a dielectric layer covering surfaces of the first and second lower electrodes, and an upper electrode on the dielectric layer.
申请公布号 US2005142732(A1) 申请公布日期 2005.06.30
申请号 US20040026171 申请日期 2004.12.29
申请人 DONGBUANAM SEMICONDUCTOR INC. 发明人 SHIM HEE SUNG
分类号 H01L27/108;H01L21/02;H01L21/8242;(IPC1-7):H01L21/824 主分类号 H01L27/108
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