发明名称 Method and device for carrying out working steps on miniaturized modules
摘要 In order to provide a method of carrying out working steps in at least one work station on miniaturised modules which are held by a module carrier provided with a holding device, whereby the method enables a plurality of processing steps to be carried out on a module, it is proposed that the module be moved by one of the module carriers to a plurality of work stations for carrying out the working steps and that it be precisely positioned for carrying out one of the working steps by means of a relative movement between the module carrier and the currently relevant one of the plurality of workstations, and in that the positioning of the module relative to the module carrier be maintained for carrying out the working steps.
申请公布号 US2005139449(A1) 申请公布日期 2005.06.30
申请号 US20050036301 申请日期 2005.01.14
申请人 MENSCHIG ARND 发明人 MENSCHIG ARND
分类号 B23Q7/14;H01L21/677;H01L21/68;(IPC1-7):B65G15/64 主分类号 B23Q7/14
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