MAGNETIC THIN FILM FOR HIGH FREQUENCY AND ITS PRODUCTION METHOD, AND MAGNETIC ELEMENT

摘要

A multilayer film (1) is formed on a substrate (4) by alternating Co-based amorphous alloy layers (2) and natural oxide layers (3) of a natural oxide of the Co-based amorphous alloy (2), and the proportion of the volume of the natural oxide layers (3) to the total volume of the multilayer film (1) is 5 to 50%. With this, a magnetic thin film for high frequency and a magnetic element both usable in the high frequency range of the GHz band are produced. Alternatively, the magnetic thin film (1) can be produced by a method in which Co-based amorphous alloy layers (2) having a property that the direction in which the magnetic field is applied when the thin film is produced is the easy axis of magnetization and natural oxide layers (3) of a natural oxide of the Co-based amorphous alloy are alternated to form the magnetic thin film (1), and the easy axis of magnetization of the thus-formed multilayer film (1) is perpendicular to the direction in which the magnetic field is applied during the formation of the multilayer film (1).