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发明名称
Vakuumpumpenanlage und Verfahren zur Erzeugung eines Endvakuums
摘要
申请公布号
DE10108631(B4)
申请公布日期
2005.06.30
申请号
DE2001108631
申请日期
2001.02.22
申请人
NASH-ELMO INDUSTRIES GMBH
发明人
DITTMAR, RUDI;HAHM, OTTMAR;HOLZHEIMER, GUENTER;KOPF, MARKUS
分类号
F04B37/14;F04C23/00;F04D17/16;F04D23/00;F04D25/06;(IPC1-7):F04B41/06;F04C19/00;F04D17/10
主分类号
F04B37/14
代理机构
代理人
主权项
地址
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