OBJECT LENS, ELECTRON BEAM DEVICE, AND MANUFACTURING METHOD OF DEVICE USING THEM

摘要

PROBLEM TO BE SOLVED: To provide an electron beam device having a cathode having a long life without being influenced by ions generated in a lens barrel part, and capable of possibly forming five or more electron beams from one electron gun because arrangement around an optical axis of the plurality of electron beams is appropriate. SOLUTION: This electron beam device is so structured that the electron beams in directions outside an optical axis emitted from the electron gun of a ZrO/W (tungsten zirconate) cathode or a transition metal carbide cathode is converged on a sample to execute scanning. The electron beam device is equipped with a plate for reducing vacuum conductance between the side of an electron gun chamber and the sample side; and an opening for passing the electron beams is formed at a position separated from the optical axis on the plate. COPYRIGHT: (C)2005,JPO&NCIPI