| 摘要 |
PROBLEM TO BE SOLVED: To provide a dry pump and an operation method of the dry pump to prevent the internal contamination, suppressing the influence on the pump performance and the equipment accuracy. SOLUTION: The dry pump 2 is provided with a multi-stage (six-stage) rotor chamber 20 to store rotors 11, 12, 13, 14, 15 and 16 respectively and connected in series, a gas ballast means 2, which is connected to at least one rotor chamber 20 downstream from a three-stage one, for example, and introduces gas ballast gas into the rotor chamber 20, and a heating means 3 to heat the gas ballast gas before introduced into the rotor chamber 20 outside the rotor chamber 20 to the temperature higher than the gas temperature in the rotor chamber 20. COPYRIGHT: (C)2005,JPO&NCIPI
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