摘要 |
PROBLEM TO BE SOLVED: To provide a technology for simplifying the fabrication process of a charge transfer device. SOLUTION: The charge transfer device 100 comprises a semiconductor substrate (not shown), a photoelectric conversion element (not shown) provided on the semiconductor substrate, and a charge transfer passage 120 provided on the semiconductor substrate and transferring charges generated in the photoelectric conversion element. The charge transfer passage 120 is shaped such that a wide part 120a and a narrow part 120b having different width in the in-plane direction of the semiconductor substrate are provided alternately along the charge transfer direction. COPYRIGHT: (C)2005,JPO&NCIPI
|