| 摘要 |
A method of fabricating an interconnection structure of a semiconductor device includes the steps of successively depositing an etch-stop layer and an intermetal insulating layer on a semiconductor substrate, forming a sacrificial insulating layer on the intermetal insulating layer, forming a photoresist pattern on the sacrificial insulating layer to define a trench formation region, etching the intermetal insulating layer using a mask of the photoresist pattern to form a trench, and etching the entire etch-stop layer.
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