发明名称 |
Mass-production transfer support system and semiconductor manufacturing system |
摘要 |
A mass-production transfer support system has a mass-production transfer source managing computer for managing information generated in a trial-production process of a semiconductor device and a mass-production transfer destination managing computer for managing a mass-production process of the semiconductor device. The mass-production transfer source managing computer comprises: quality/recipe information input accepting means; quality/recipe information sending means; apparatus-difference correction information input accepting means for accepting an input of apparatus-difference correction information for correcting a difference in the quality of the semiconductor device associated with an apparatus-difference between semiconductor manufacturing apparatuses; apparatus-difference correction information storing means; and apparatus-difference correction information providing means for storing the apparatus-difference correction information in a database accessible by the mass-production transfer destination managing computer.
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申请公布号 |
US2005143853(A1) |
申请公布日期 |
2005.06.30 |
申请号 |
US20040020395 |
申请日期 |
2004.12.27 |
申请人 |
SEMICONDUCTOR LEADING EDGE TECHNOLOGIES, INC. |
发明人 |
AKIMORI HIROYUKI;OHYAMA YASUSHI;NISHIMURA HIDETAKA;KOBAYASHI SHIGERU |
分类号 |
G06Q10/00;G06Q50/00;(IPC1-7):G06F19/00 |
主分类号 |
G06Q10/00 |
代理机构 |
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