MANUFACTURING METHOD OF DISPLAY DEVICE

摘要

A display device having a plurality of pixels and which realizes a color display with emitted light of at least two wavelengths wherein each pixel has a microresonator structure between a lower reflective film formed on a side near a substrate and an upper reflective film formed above the lower reflective film with an organic light emitting element layer therebetween. The lower reflective film is made of a metal thin film and a conductive resonator spacer layer which functions as a first electrode is provided between the lower reflective film and the organic light emitting element layer. A thickness of the conductive resonator spacer layer is changed by changing a number of layers or a number of remaining layers of transparent conductive metal oxide layers made of ITO corresponding to pixels of different light emission wavelengths. An amorphous ITO layer at an upper layer is selectively removed from above a polycrystalline ITO layer at a lower layer using the polycrystalline ITO layer as an etching stopper so that the thickness is changed corresponding to the thickness of the ITO layer to be formed and not removed. Light obtained in the organic light emitting element layer is intensified by the microresonator structure in which the optical length is adjusted by the conductive resonator spacer layer and is emitted to the outside.