| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide raw material powder for a sintered compact target in which ZnS powder and SiO<SB>2</SB>powder are uniformly mixed without unevenness of density, to provide a method of producing a target where productive efficiency is improved, and further, a sintered compact target having a uniform structure, free of the unevenness of density, and having high relative density can be obtained, and to provide the target. <P>SOLUTION: The raw material powder for a sintered compact target for forming a optical recording medium protective film is obtained by improving raw material powder having a composition composed of SiO<SB>2</SB>powder with a mean particle diameter of 0.0005 to 10 μm by 10 to 30 mol%, and the balance ZnS powder with a mean particle diameter of 1 to 20 μm, and in which the SiO<SB>2</SB>powder is dispersed into the ZnS matrix, and is characterized in that it contains straight chain alkylcarboxylic acid by 0.1 to 5 wt.% to the mixture. Further, the raw material powder is charged inside a hot press die, and is hot-pressed at 700 to 1,200°C under 20 to 40 MPa in a vacuum or in a gaseous Ar atmosphere, thus the sintered compact target is produced. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
