| 摘要 |
PROBLEM TO BE SOLVED: To overcome the problem in measuring a distance to a target by using a capacitance sensor wherein it is difficult to join the target to the earth with low impedance. SOLUTION: This measuring apparatus comprises a mount table, a sensor probe holding member, and a sensor amplifier having first and second terminals connected to a sensor probe to output measurement results. An electrode of the sensor probe is connected to the first terminal, and a closed circuit of a system under measurement including the sensor probe is connected between the first and second terminals. A stage is provided for enabling the target to be moved. A stage control part is provided for driving/controlling the stage. Measurement is performed while moving the target. This instrument is characterized in that a conductor member is disposed so as not to contact with and in close vicinity to the target, and so as to produce desired capacitance between them, and that the conductor member is disposed so as to prevent the capacitance between the conductor member and the target from being changed in keeping with the movement of the stage in a measurement zone. COPYRIGHT: (C)2005,JPO&NCIPI |
