| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain a lightweight mirror having high rigidity, high heat radiating property and super-precision surface roughness and flatness, in which a reflection film having no crack can be easily formed. <P>SOLUTION: The lightweight high rigidity mirror is to be used as a component of a semiconductor manufacturing apparatus or a component of a liquid crystal manufacturing apparatus. The mirror has a honeycomb structure comprising a SiC-Si composite material, and has a plate comprising a SiC-Si composite material joined to the upper and lower sides of the honeycomb structure. The surface of the plate functioning as a mirror is polished into a mirror face, and the polished surface is coated with a diamond-like carbon smoothening film. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
