发明名称 METHOD FOR MANUFACTURING MAGNETIC RANDOM ACCESS MEMORY, AND MAGNETIC RANDOM ACCESS MEMORY MANUFACTURED THEREBY
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing an MRAM consuming less power for recording. SOLUTION: The MRAM manufacturing method comprises a step of etching a magnetoresistive film 220 by using a mask pattern 961, a step of fabricating an insulating film and then a metal film on the whole surface after the etching step, and a step of removing the mask pattern 961 and the insulating film and the metal film that are on the mask pattern 961. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005175059(A) 申请公布日期 2005.06.30
申请号 JP20030410183 申请日期 2003.12.09
申请人 CANON INC 发明人 IKEDA TAKASHI
分类号 H01L27/105;H01L21/8246;H01L43/08;(IPC1-7):H01L27/105 主分类号 H01L27/105
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