发明名称 |
METHOD FOR FORMING THIN FILM AND APPARATUS THEREFOR |
摘要 |
<p>A plurality of antenna elements, each of which has first and second linear conductors whose first ends are electrically interconnected are formed. The antenna elements are arranged in plane in such a way that the first and second linear conductors are alternated and separated from one another at regular intervals, thereby forming one or more array antennas which are disposed in a chamber. The second ends of the first linear conductors are connected to a high-frequency power supply, and the second ends of the second linear conductors are connected to ground. A plurality of substrates are parallel placed on both sides of the array antennas at distances approximate to the distances between the linear conductors. A film is formed by introducing an ingredient gas into the chamber. <IMAGE></p> |
申请公布号 |
EP1548151(A1) |
申请公布日期 |
2005.06.29 |
申请号 |
EP20030751327 |
申请日期 |
2003.10.03 |
申请人 |
ISHIKAWAJIMA-HARIMA HEAVY INDUSTRIES CO., LTD. |
发明人 |
UEDA, MASASHI;TAKAGI, TOMOKO;ITO, NORIKAZU |
分类号 |
C23C16/509;H01L31/04;H01L31/18;(IPC1-7):C23C16/509;H01L21/205 |
主分类号 |
C23C16/509 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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