LAYER SYSTEM COMPRISING A TITANIUM-ALUMINIUM-OXIDE LAYER

摘要

#CMT# #/CMT# Coated object comprises a substrate with at least one functional layer containing at least one intermediate layer which has a layer thickness of d z= 10 nm. The intermediate layer interrupts the morphology of the functional layer. #CMT# : #/CMT# An independent claim is also included for a process for the production of a coated object using a CVD or PVD process. #CMT#USE : #/CMT# Used as a prism, lens, mirror, reflector, filter or illuminating body for UV and IR wavelength regions, as a display for monitors or display units, as support for lithographic processes and as a cooking surface (claimed). #CMT#ADVANTAGE : #/CMT# The object has good optical and mechanical properties. #CMT#CERAMICS AND GLASS : #/CMT# Preferred Features: The functional layer is predominantly a crystalline layer and the intermediate layer interrupts the morphology of the functional layer once so that partial layers are produced. The functional layer contains oxide, nitride, carbide, fluoride, chloride, selenide, telluride and/or sulfide compounds of Li, Be, Na, Mg, Al, Si, Ca, Sc, Ti, Cr, Zn, Ge, Sr, Y, Zr, Nb, Cd, In, Sn, Sb, Te, La, Ce, Pr, Nd, Sm, Gd, Yb, Lu, Hf, Ta, Tl, Pb, Bi and/or Th.