Surface texture measuring instrument and width-measuring method

摘要

A surface texture measuring instrument has a rotary table (10) on which a workpiece (W) is rotatably mounted, a Z-axis slider capable of moving in a Z-axis direction parallel to a rotation axis (C) of the rotary table (10), an X-axis slider (5) that is held by the Z-axis slider (4) and is advanceable and retractable in an X-axis direction orthogonal to the rotation axis, a first arm (6) that is held by the X-axis slider (5) and is rotatable around a center line parallel to the X-axis, a second arm (7) that is held by the first arm (6) and is advanceable and retractable in a direction orthogonal to the X-axis, and a detector (8) held by the second (7) arm to measure a surface texture of the workpiece (W).