METHOD OF CORRECTION OF LINE-WIDTH CHANGE BY VACUUM DELAY TIME,申请号KR20030095576-传众专利搜索

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发明名称	METHOD OF CORRECTION OF LINE-WIDTH CHANGE BY VACUUM DELAY TIME
摘要
申请公布号	KR20050064226(A)	申请公布日期	2005.06.29
申请号	KR20030095576	申请日期	2003.12.23
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	JANG, SUNG HOON;LEE, HO JUNE
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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